International Journal of Advances in Electrical Engineering
2022, Vol. 3, Issue 2, Part A
Influence of substrate preliminary processing on the properties of the heterostructure
Author(s): EL Pankratov
Abstract: In this paper we analyze effect of preliminary processing of substrate on properties of the grown heterostructure. It has been shown that growth of an epitaxial layer on a buffer layer after preliminary (before starting of growth) annealing makes it possible to decrease of value of miss match-induced stress. An analytical approach has been introduced for analysis of mass and heat transfer in a multilayer structures with account miss match-induced stress.
Pages: 105-121 | Views: 118 | Downloads: 44
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How to cite this article:
EL Pankratov. Influence of substrate preliminary processing on the properties of the heterostructure. Int J Adv Electr Eng 2022;3(2):105-121.